In situ observation of thermal and photon-induced reactions on Si surfaces by ultraviolet photoelectron spectroscopy

Y. Takakuwa, T. Yamaguchi, T. Hori, T. Horie, Y. Enta, H. Sakamoto, H. Kato, N. Miyamoto

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

Ultraviolet photoelectron spectroscopy (UPS) was employed to observe in situ the surface reaction during the gas source molecular beam epitaxy (GSMBE), etching, and growth and decomposition of an SiO2 layer on high-temperature Si surfaces under a reactive gas atmosphere. In this paper, we review the in-situ UPS observation of the surface reactions during the thermal desorption of H2, SiCl and SiO on Si(001)2 × 1. A monochromatized synchrotron radiation (SR) source, the photon energy and radiation incidence angle of which were tuned for maximizing the photon-induced hydrogen removal efficiency, was used as a probe for UPS to observe in situ the surface reactions during SR-assisted GSMBE. As a result, no probe-beam-induced disturbance of the irradiation effect occurred and probe-beam positioning within the irradiated area was not necessary. The oscillatory behavior of the surface state intensities during GSMBE enabled us to measure simultaneously the growth rate and the surface hydrogen coverage during irradiation by an SR source.

Original languageEnglish
Pages (from-to)747-755
Number of pages9
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume88-91
DOIs
Publication statusPublished - 1998 Mar

Keywords

  • Etching
  • Gas source molecular beam epitaxy
  • Oxidation
  • Photon-induced reactions
  • Silicon
  • Ultraviolet photoelectron spectrocopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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