In situ observation of photon-stimulated hydrogen removal on a HF-passivated Si(111) surface by ultraviolet photoelectron spectroscopy using synchrotron radiation

Yuji Takakuwa, Masafumi Nogawa, Hiroyuki Ishida, Michio Niwano, Hiroo Kato, Nobuo Miyamoto

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Photon-stimulated hydrogen removal on a HF-passivated Si(111) surface has been investigated by ultraviolet photoelectron spectroscopy (UPS) using synchrotron radiation (SR). Vacuum ultraviolet (VUV) light, which was tuned to a photon energy of ∼23eV and an incidence angle of ∼45° to maximize the efficiency of hydrogen removal due to irradiation, was employed as a light source for UPS measurement as well as for irradiation. This enabled us to observe in situ the changes in the adsorption state and the amount of surface hydrogen during irradiation without probe-beam induced disturbance of hydrides and the need to position a probe beam within an irradiated area on the surface. UPS spectra for the HF-passivated Si(111) surface, which was composed primarily of trihydride with a small amount of dihydride and monohydride prior to irradiation, showed that the amount of each kind of hydride varied with irradiation time in a different manner. The variation is interpreted in terms of a kinetics model proposed for the photon-stimulated hydrogen removal reaction, in which monohydride and dihydride are produced via photon-stimulated hydrogen removal in dihydride and trihydride, respectively. Based on the reaction kinetics model, it was clarified that the order of magnitude in the rate of photon-stimulated hydrogen removal R is R(monohydride) > R(dihydride) > R(trihydride).

Original languageEnglish
Pages (from-to)7699-7705
Number of pages7
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number12 SUPPL. B
DOIs
Publication statusPublished - 1997 Dec

Keywords

  • HF passivation
  • Hydrogen adsorption state
  • Hydrogen removal
  • In-situ observation
  • PSD
  • Si(111)
  • Synchrotron radiation
  • UPS

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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