In situ observation of formation processes of titanium compound thin films due to ion implantation in a transmission electron microscope

Y. Kasukabe, Z. L. Dizard, Y. Fujino, H. Tani, M. Osaka, Y. Yamada, Hiroaki Abe

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

Ions (C+, N2+ and O+) implantation into evaporated Ti films was performed in the transmission electron microscope (TEM). Ti films grown on NaCl (001) surfaces at room temperature consisted mainly of (03·5)-oriented hcp-Ti and (110)-oriented CaF2-type TiHx. NaCl-type Ti compounds of (001)-oriented TiCz, TiNy and TiOu were epitaxially formed by the transformation of (03·5)-oriented hcp-Ti to (001)-oriented fcc-Ti sublattices and the occupation of the octahedral (O-) sites by implanted ions, whereas (110)-oriented Ti compounds were formed from a (110)-oriented TiHx without structural transformation of Ti sublattices. Observations of EELS elucidated that, in the early N-implanting stage, the variation of the energy of the loss peak due to plasmon excitation of the areas where TiHx grew in the as-evaporated Ti films was different from that of the areas where hcp-Ti grew. Analysis of Mulliken bond overlap populations indicated that the occupation of O-sites by N atoms gives rise to weakening of Ti-Ti bonds and forming of Ti-N covalent bonds.

Original languageEnglish
Pages (from-to)390-394
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume206
DOIs
Publication statusPublished - 2003 May 1
Event13th International conference on Ion beam modification of Mate - Kobe, Japan
Duration: 2002 Sep 12002 Sep 6

Keywords

  • EELS
  • Fcc-hcp transformation
  • In situ TEM
  • Ion-implantation

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

Fingerprint Dive into the research topics of 'In situ observation of formation processes of titanium compound thin films due to ion implantation in a transmission electron microscope'. Together they form a unique fingerprint.

Cite this