We investigated formation processes of a porous anodic alumina film on a p-type silicon (Si) substrate using infrared absorption spectroscopy in the multiple internal reflection geometry (MIR-IRAS). We observed drastic IR spectral changes when porous anodic alumina film approached interfaces between an aluminum (Al) layer and a Si substrate. The intensity of the IR absorption peaks due to water (H2O) molecules and silicon oxides (SiO 2) increased simultaneously with a spike of anodic current density. The IR spectral changes indicated that the penetration of electrolytes brought about inhomogeneous oxidation of a Si substrate surface. We observed that the arrangement of the SiO2 nanodots closely reflected that of pores of a porous anodic alumina film. IR absorption peaks due to porous anodic alumina finally disappeared. The formation of SiO2 nanodots on a Si substrate promoted penetration of electrolytes to peel the porous anodic alumina film off it.
|Number of pages||5|
|Journal||Materials Research Society Symposium - Proceedings|
|Publication status||Published - 2003 Dec 1|
|Event||Continuous Nanophase and Nanostructured Materials - Boston, MA., United States|
Duration: 2003 Dec 1 → 2003 Dec 5
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials