In-situ observation of electromigration failure in AlCuSi interconnects with a passivation film

Takenao Nemoto, Takeshi Nogami, A. Toshimitsu Yokobori, Tsutomu Murakawa

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'In-situ observation of electromigration failure in AlCuSi interconnects with a passivation film'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science