In situ monitoring of Zn* and Mg* species during helicon-wave-excited-plasma sputtering epitaxy of ZnO and Mg 0.06Zn0.94O films

T. Koyama, T. Ohmori, N. Shibata, T. Onuma, Shigefusa Chichibu

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9 Citations (Scopus)

Abstract

The results of Plume Emission spectroscopy (PES) on Zno and MgO, to identify the atomic species responsible for the MgxZn1-xO epitaxial formation, are discussed. The structural qualities of the epilayers were improved by the use of nearly lattice-matched substrates having proper surface arrangements. The epilayers found to have atomically smooth surfaces along with the 0.26-nm-high monolayer steps in ZnO epilayers. The results show that the ZnO and Mg0.06Zn0.94O epilayers exhibits a predominant near-band-edge photoluminesence peak at room temperature.

Original languageEnglish
Pages (from-to)2220-2225
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number4
DOIs
Publication statusPublished - 2004 Jul 1
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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