We have investigated in situ spectroscopic ellipsometry in the case of atomic layer-by-layer metalorganic chemical vapor deposition of YBa2Cu3Ox (YBCO) thin films. We have demonstrated the effectiveness of spectroscopic measurement from the relationship between the film properties and trajectories of the pseudodielectric function of YBCO thin films deposited on SrTiO3 substrates. We have also demonstrated, in detail, how high-quality crystalline YBCO, formed in the initial growth stage, can be obtained from the imaginary part of the pseudodielectric function around 4.1 eV. Superconductivity of YBCO films can be estimated during film deposition using optical measurements.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Issue number||6 A/B|
|Publication status||Published - 1999 Jun 15|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)