In-situ chemical vapor deposition of alumina catalyst bed on a suspended membrane microreactor

Tomokazu Takahashi, Shuji Tanaka, Kuei Sung Chang, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes in-situ chemical vapor deposition (CVD) method to deposit alumna catalyst bed selectively on the suspended membrane of a microreactor. The microreactor with suspended membrane structure can realize good thermal isolation of the reaction area on the membrane, because heat conduction through the thin suspended membrane is quite small. However, it is difficult to form catalyst selectively on the suspended membrane. The solution can be given by the in-situ CVD method, by which alumina is deposited from alumina precursor selectively on the suspended membrane heated by integrated micro-heaters. We fabricated the suspended-membrane microreactors, and set up an in-situ CVD system using aluminum tri-isopropoxide (Al[(CH3) 2CHO]3) as the precursor. Preliminary deposition tests were preformed. The deposits were observed using a scanning electron microscope (SEM), and the composition of the deposits was analyzed by energy dispersive spectroscopy (EDX).

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages899-903
Number of pages5
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Alumina
  • Catalyst bed
  • Chemical vapor deposition
  • Micro-fuel reformer
  • Suspended membrane

ASJC Scopus subject areas

  • Engineering(all)

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