TY - GEN
T1 - In-situ chemical vapor deposition of alumina catalyst bed on a suspended membrane microreactor
AU - Takahashi, Tomokazu
AU - Tanaka, Shuji
AU - Chang, Kuei Sung
AU - Esashi, Masayoshi
PY - 2005/11/9
Y1 - 2005/11/9
N2 - This paper describes in-situ chemical vapor deposition (CVD) method to deposit alumna catalyst bed selectively on the suspended membrane of a microreactor. The microreactor with suspended membrane structure can realize good thermal isolation of the reaction area on the membrane, because heat conduction through the thin suspended membrane is quite small. However, it is difficult to form catalyst selectively on the suspended membrane. The solution can be given by the in-situ CVD method, by which alumina is deposited from alumina precursor selectively on the suspended membrane heated by integrated micro-heaters. We fabricated the suspended-membrane microreactors, and set up an in-situ CVD system using aluminum tri-isopropoxide (Al[(CH3) 2CHO]3) as the precursor. Preliminary deposition tests were preformed. The deposits were observed using a scanning electron microscope (SEM), and the composition of the deposits was analyzed by energy dispersive spectroscopy (EDX).
AB - This paper describes in-situ chemical vapor deposition (CVD) method to deposit alumna catalyst bed selectively on the suspended membrane of a microreactor. The microreactor with suspended membrane structure can realize good thermal isolation of the reaction area on the membrane, because heat conduction through the thin suspended membrane is quite small. However, it is difficult to form catalyst selectively on the suspended membrane. The solution can be given by the in-situ CVD method, by which alumina is deposited from alumina precursor selectively on the suspended membrane heated by integrated micro-heaters. We fabricated the suspended-membrane microreactors, and set up an in-situ CVD system using aluminum tri-isopropoxide (Al[(CH3) 2CHO]3) as the precursor. Preliminary deposition tests were preformed. The deposits were observed using a scanning electron microscope (SEM), and the composition of the deposits was analyzed by energy dispersive spectroscopy (EDX).
KW - Alumina
KW - Catalyst bed
KW - Chemical vapor deposition
KW - Micro-fuel reformer
KW - Suspended membrane
UR - http://www.scopus.com/inward/record.url?scp=27544470331&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544470331&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1496563
DO - 10.1109/SENSOR.2005.1496563
M3 - Conference contribution
AN - SCOPUS:27544470331
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 899
EP - 903
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -