In situ atomic force microscopy observation of dissolution process of Si(111) in oxygen-free water at room temperature

Hirokazu Fukidome; Michio Matsumura; Tadahiro Komeda; Kenji Namba; Yasushiro Nishioka

doi:10.1149/1.1390848

In situ atomic force microscopy observation of dissolution process of Si(111) in oxygen-free water at room temperature

Hirokazu Fukidome, Michio Matsumura, Tadahiro Komeda, Kenji Namba, Yasushiro Nishioka

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

Si(111) surfaces were found to be easily flattened on an atomic scale by a treatment with water from which oxygen was removed by addition of a chemical deoxygenator. By in situ atomic force microscope measurements of the Si(111) surface, we succeeded for the first time in observing the flow of the steps on the atomically flattened Si(111) surface in oxygen-free water. The average step-flow rate was estimated to be 8 nm/min at room temperature.

Original language	English
Pages (from-to)	393-394
Number of pages	2
Journal	Electrochemical and Solid-State Letters
Volume	2
Issue number	8
DOIs	https://doi.org/10.1149/1.1390848
Publication status	Published - 1999 Aug
Externally published	Yes

ASJC Scopus subject areas

Chemical Engineering(all)
Materials Science(all)
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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AU - Fukidome, Hirokazu

AU - Matsumura, Michio

AU - Komeda, Tadahiro

AU - Namba, Kenji

AU - Nishioka, Yasushiro

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AB - Si(111) surfaces were found to be easily flattened on an atomic scale by a treatment with water from which oxygen was removed by addition of a chemical deoxygenator. By in situ atomic force microscope measurements of the Si(111) surface, we succeeded for the first time in observing the flow of the steps on the atomically flattened Si(111) surface in oxygen-free water. The average step-flow rate was estimated to be 8 nm/min at room temperature.

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In situ atomic force microscopy observation of dissolution process of Si(111) in oxygen-free water at room temperature

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