In situ analysis of the thermal behavior in the Zr-based multi-component metallic thin film by pulsed laser deposition combined with UHV-laser microscope system

Yuji Matsumoto, Miki Hiraoka, Masao Katayama, Seiichi Hata, Mikio Fukuhara, Takeshi Wada, Hisamichi Kimura, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The thermal behavior of the Zr-based multi-component metallic thin films was investigated under an atmospheric N2 condition by using pulsed laser deposition (PLD)-combined with in situ laser microscope (LM) system. The Zr-based multi-component metallic thin films were prepared in amorphous by PLD with a stoichiometric target of the Zr-based metallic glass. By comprehensive study with ex situ analyses such as XRD, SEM and EPMA techniques, it was found that the gradual formation of Zr2Ni alloy particles occurred above 500 °C, and subsequently the inhomogeneous contrast, probably owing to the partial formation of ZrO2 on the film surface appeared at high temperature.

Original languageEnglish
Pages (from-to)179-182
Number of pages4
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume148
Issue number1-3
DOIs
Publication statusPublished - 2008 Feb 25
Externally publishedYes

Keywords

  • Laser microscope
  • Metallic glass
  • Pulsed laser deposition
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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