In-process micro/nano measurement for micro cutting

I Ko, Kang Won Lee, Young Jin Noh, Yoshikazu Arai, Yuki Shimizu

Research output: Chapter in Book/Report/Conference proceedingChapter

1 Citation (Scopus)


This chapter presents a hybrid instrument, which consists of a fast tool servo and a piezoelectric force sensor. It presents a design strategy for integration of the force sensor into the fast tool servo so that the instrument can have a high sensitivity for in-process force detection as well as a high stiffness and bandwidth for cutting of micro structures. The chapter describes in-processing force measurement by using the hybrid instrument and employs in-process force data to estimate the tool wear. It also presents a new technique for on-machine surface profile measurement by using the hybrid instrument as a force controlled stylus probing instrument.

Original languageEnglish
Title of host publicationMicro-Cutting
Subtitle of host publicationFundamentals and Applications
Number of pages30
ISBN (Electronic)9781118536605
ISBN (Print)9780470972878
Publication statusPublished - 2013 Aug 9


  • Cutting tool
  • Hybrid instrument
  • In-process nano measurement
  • Micro cutting force
  • Micro surface form
  • Micro wear
  • N-process micro measurement

ASJC Scopus subject areas

  • Engineering(all)


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