In-process force monitoring in diamond turning of micro-patterns

I Ko, Satoshi Genda, Satoshi Kiyono

Research output: Contribution to journalConference articlepeer-review

Abstract

A fast servo with a force measuring instrument was designed and made to monitor the machining force during generating micro-patterns. The thrust force was found to be on the order of 100mN.

Original languageEnglish
Pages (from-to)412-416
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4222
DOIs
Publication statusPublished - 2000 Dec 1
EventProcess Control and Inspection for Industry - Beijing, China
Duration: 2000 Nov 82000 Nov 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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