We propose a novel approach to fabricate metal oxide nanostructures with locally modified thicknesses. Utilizing a nanoscale shadowing effect induced by a three-dimensional nanotemplate patterned on a substrate, we demonstrate that pulsed-laser deposition in an in-plane oblique configuration enables us to locally grow an oxide. The analysis on the growth position reveals that it can be precisely defined by adjusting only a few geometrical parameters. A ferromagnetic oxide Fe2.5Zn0.5O4 nanoconstriction with a bottleneck width of 65nm and a length of 53nm is fabricated by controlling the incident azimuthal angle and growth duration in sequential deposition processes.
ASJC Scopus subject areas
- Physics and Astronomy(all)