In-plane oblique pulsed-laser deposition and its application to the fabrication of metal oxide nanoconstrictions

Takayoshi Kushizaki, Kohei Fujiwara, Yasushi Fujiwara, Azusa N. Hattori, Hidekazu Tanaka

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

We propose a novel approach to fabricate metal oxide nanostructures with locally modified thicknesses. Utilizing a nanoscale shadowing effect induced by a three-dimensional nanotemplate patterned on a substrate, we demonstrate that pulsed-laser deposition in an in-plane oblique configuration enables us to locally grow an oxide. The analysis on the growth position reveals that it can be precisely defined by adjusting only a few geometrical parameters. A ferromagnetic oxide Fe2.5Zn0.5O4 nanoconstriction with a bottleneck width of 65nm and a length of 53nm is fabricated by controlling the incident azimuthal angle and growth duration in sequential deposition processes.

Original languageEnglish
Article number035201
JournalApplied Physics Express
Volume6
Issue number3
DOIs
Publication statusPublished - 2013 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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