In-flight particle characteristics in a DC-RF hybrid plasma flow system

Kohtaro Kawajiri, Hideya Nishiyama

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

In-flight particle characteristics are clarified experimentally for a DC-RF hybrid plasma flow for various operating pressures. A recirculation effect in a coil region becomes small for a DC-RF hybrid plasma flow, and particle velocity increases with decreasing operating pressure and the swirl gas ratio. Particles are heated effectively by increasing operating pressure and the swirl gas ratio. Multi-input and multi-objective optimization is conducted to obtain Pareto-optimal resolutions, in which particle velocity and particle temperature in the downstream region are maximized for high quality in-flight particle processing.

Original languageEnglish
Pages (from-to)660-664
Number of pages5
JournalThin Solid Films
Volume506-507
DOIs
Publication statusPublished - 2006 May 26

Keywords

  • DC-RF hybrid plasma flow
  • Experimental analysis
  • In-flight particle characteristics
  • Statistical optimization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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