TY - JOUR
T1 - Impurity measurement in specialty gases using an atmospheric pressure ionization mass spectrometer with a two-compartment ion source
AU - Kitano, Masafumi
AU - Shirai, Yasuyuki
AU - Ohki, Atsushi
AU - Babasaki, Shinichi
AU - Ohmi, Tadahiro
PY - 2001/4
Y1 - 2001/4
N2 - Using an atmospheric pressure ionization mass spectrometer (APIMS) with a two-compartment ion source, impurity in specialty gases (CH4, SiH4, GeH4) is measured due to a stable ionization reaction with a detection limit of approximately 0.1 to 1 parts per billion (ppb). The form in which the impurity exists in these gases has been clarified. In the case of SiH4, the main impurity is disiloxane (SiH3-O-SiH3). We have also established a method for obtaining the SiH3-O-SiH3 calibration curve standardized for a known concentration of SiH3-O-SiH3 generated from the reaction of SiH4 with H2O. In the case of CH4 and GeH4, the main impurity is moisture (H2O) and it is quantified from the plotted H2O calibration curve.
AB - Using an atmospheric pressure ionization mass spectrometer (APIMS) with a two-compartment ion source, impurity in specialty gases (CH4, SiH4, GeH4) is measured due to a stable ionization reaction with a detection limit of approximately 0.1 to 1 parts per billion (ppb). The form in which the impurity exists in these gases has been clarified. In the case of SiH4, the main impurity is disiloxane (SiH3-O-SiH3). We have also established a method for obtaining the SiH3-O-SiH3 calibration curve standardized for a known concentration of SiH3-O-SiH3 generated from the reaction of SiH4 with H2O. In the case of CH4 and GeH4, the main impurity is moisture (H2O) and it is quantified from the plotted H2O calibration curve.
KW - APIMS
KW - Calibration curve
KW - Impurity
KW - Ion-molecule reaction
KW - Specialty gases
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U2 - 10.1143/jjap.40.2688
DO - 10.1143/jjap.40.2688
M3 - Article
AN - SCOPUS:0035300751
VL - 40
SP - 2688
EP - 2693
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4 B
ER -