Improvements in temperature characteristics and bandwidth for ZnO/quartz structure with large coupling factor

Takaki Murata, Michio Kadota, Kenji Matsuda, Tetsuya Kimura, Ken Ya Hashimoto

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient (k2). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized k2 was reported. However, both zero TCF and maximized k2 have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.

Original languageEnglish
Article number07HD25
JournalJapanese journal of applied physics
Volume49
Issue number7 PART 2
DOIs
Publication statusPublished - 2010 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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