Improvement of zone control induction heating equipment for high-speed processing of semiconductor devices

Daisuke Miyagi, Aisya Saitou, Norio Takahashi, Naoki Uchida, Kazuhiro Ozaki

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

In order to process a semiconductor device of high quality, uniform heating is necessary, but it is not easy to heat uniformly with conventional induction heating equipment. To solve this problem, zone control induction heating equipment has been jointly developed. In this paper, we examine the effect of dividing an induction heater into several small coil groups having different current and frequency, using the finite-element method. We describe the heating characteristics of the zone control coil groups and show that nearly uniform heating is possible by controlling both current and frequency.

Original languageEnglish
Pages (from-to)292-294
Number of pages3
JournalIEEE Transactions on Magnetics
Volume42
Issue number2
DOIs
Publication statusPublished - 2006 Feb
Externally publishedYes

Keywords

  • Induction heating
  • Uniform heating
  • Zone control

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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