@inproceedings{ea19d86a071e446991353b58b844adab,
title = "Improvement of zone control induction heating equipment for high-speed processing of semiconductor",
author = "Daisuke Miyagi and A. Saitoh and N. Takahashi and N. Uchidir and K. Ozaki",
year = "2005",
month = dec,
day = "12",
language = "English",
isbn = "0780390091",
series = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference",
booktitle = "INTERMAG ASIA 2005",
note = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference ; Conference date: 04-04-2005 Through 08-04-2005",
}