Improvement of zone control induction heating equipment for high-speed processing of semiconductor

Daisuke Miyagi; A. Saitoh; N. Takahashi; N. Uchidir; K. Ozaki

Improvement of zone control induction heating equipment for high-speed processing of semiconductor

Daisuke Miyagi, A. Saitoh, N. Takahashi, N. Uchidir, K. Ozaki

ENG - Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	INTERMAG ASIA 2005
Subtitle of host publication	Digests of the IEEE International Magnetics Conference
Number of pages	1
Publication status	Published - 2005 Dec 12
Event	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference - Nagoya, Japan Duration: 2005 Apr 4 → 2005 Apr 8

Publication series

Name	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

Other

Other	INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference
Country	Japan
City	Nagoya
Period	05/4/4 → 05/4/8

ASJC Scopus subject areas

Engineering(all)

Cite this

Improvement of zone control induction heating equipment for high-speed processing of semiconductor. / Miyagi, Daisuke; Saitoh, A.; Takahashi, N.; Uchidir, N.; Ozaki, K.

INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference. 2005. (INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Miyagi, D, Saitoh, A, Takahashi, N, Uchidir, N & Ozaki, K 2005, Improvement of zone control induction heating equipment for high-speed processing of semiconductor. in INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference. INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference, INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference, Nagoya, Japan, 05/4/4.

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title = "Improvement of zone control induction heating equipment for high-speed processing of semiconductor",

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year = "2005",

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day = "12",

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isbn = "0780390091",

series = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference",

booktitle = "INTERMAG ASIA 2005",

note = "INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference ; Conference date: 04-04-2005 Through 08-04-2005",

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AU - Saitoh, A.

AU - Takahashi, N.

AU - Uchidir, N.

AU - Ozaki, K.

PY - 2005/12/12

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M3 - Conference contribution

AN - SCOPUS:28444461494

SN - 0780390091

T3 - INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

BT - INTERMAG ASIA 2005

T2 - INTERMAG ASIA 2005: Digests of the IEEE International Magnetics Conference

Y2 - 4 April 2005 through 8 April 2005

ER -