Improvement of the quality factor of single crystal diamond mechanical resonators

Physics

• Resonator 100%
• Diamonds 90%
• Single Crystals 80%
• Ion 20%
• Microelectromechanical System 20%
• Implantation 10%
• Ion Implantation 10%
• Performance 10%
• Substrates 10%
• Model 10%
• Utilization 10%
• Growth 10%
• Increasing 10%
• Variations 10%
• Acceleration (Physics) 10%

Engineering

• Quality Factor 70%
• Thickness 20%
• Implantation 10%
• Energy Dissipation 10%
• Surface Defect 10%
• Extreme Condition 10%
• Models 10%
• Performance 10%
• Applications 10%
• Substrates 10%

Material Science

• Single Crystal 80%
• Epilayers 20%
• Electronic Property 10%
• Mechanical Property 10%
• Chemical Property 10%