Improvement of spatial resolution of a laser-scanning ph-imaging sensor

Motoi Nakao, Tatsuo Yoshinobu, Hiroshi Iwasaki

Research output: Contribution to journalArticlepeer-review

68 Citations (Scopus)

Abstract

We investigated the spatial resolution of a laser-scanning semiconductor-based pH-imaging sensor both experimentally and theoretically. A spatial resolution better than 100 µ m was obtained by thinning the Si substrate to 100 µ m. The simulation results on the spatial resolution based on a carrier diffusion model agreed well with those obtained by experiment. From the simulation results, we also predicted the optimal choice of parameters of Si substrate (thickness, doping, etc.) for the pH-imaging sensor.

Original languageEnglish
Pages (from-to)L394-L397
JournalJapanese journal of applied physics
Volume33
Issue number3
DOIs
Publication statusPublished - 1994 Mar
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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