Improvement of MOSFET subthreshold leakage current by its irradiation with hydrogen radicals generated in microwave-excited high-density inert gas plasma

Y. Saito, H. Takahashi, K. Ohtsubo, Masaki Hirayama, S. Sugawa, H. Aharoni, T. Ohmi

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science