Improvement of machined surface quality in ultra-precision plane honing

Tsunemoto Kuriyagawa, Kazunari Nishihara, Shinya Suzuki, Yinbiao Guo, Katsuo Syoji

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


This paper deals with a suitable wheel pattern for better surface roughness and flatness of workpieces in ultra-precision plane honing. Analyzing the trajectory of the cutting edge in honing and the influence of the dynamic pressure of machining fluid, a radial pattern wheel was designed, which has long and narrow abrasive sticks in the radial direction of the metal disk. Compared with the conventional wheel, it is evident that the radial wheel provides good machined surfaces with higher machining flatness and finer surface roughness.

Original languageEnglish
Pages (from-to)137-142
Number of pages6
JournalKey Engineering Materials
Publication statusPublished - 2003 Jan 1


  • Dynamic pressure
  • Flatness
  • Optical waveguide
  • Plane honing
  • Radial wheel
  • Scratch
  • Spiral wheel
  • Surface roughness
  • Ultra-fine grit diamond wheel
  • Wafer

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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