Improvement of machined surface flatness in ultra-precision plane honing

S. Suzuki, N. Yoshihara, T. Kuriyagawa

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

In recent years, there has been a great demand for large-diameter wafers with high flatness of hard and brittle materials that are used as optical and sensor elements. To meet these demands, we have developed an ultra-precision plane honing method as a highly efficient surface finishing technique using a fixed abrasive. This technique offers good finish surface roughness, shallow subsurface damage and high machining efficiency. However, there is a need to improve the surface flatness, which is dependent on the grinding wheel surface flatness and the tilt of the spindles. In this paper, the relationship between grinding wheel surface flatness and the shape of a truer is investigated by calculating the contact length of a point on the grinding wheel with the truer. It was found that there is an optimum shape of the truer to make the grinding wheel surface flat, and the machined 3-inch glass wafer is controlled to a flatness of less than 1μm by using the optimum truer.

Original languageEnglish
Title of host publicationKey Engineering Materials
PublisherTrans Tech Publications Ltd
Pages359-364
Number of pages6
ISBN (Print)9780878499748
DOIs
Publication statusPublished - 2005

Publication series

NameKey Engineering Materials
Volume291-292
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Keywords

  • Flatness of grinding wheel
  • Flatness of workpiece
  • Plane honing
  • Shape of truer
  • Truing

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Suzuki, S., Yoshihara, N., & Kuriyagawa, T. (2005). Improvement of machined surface flatness in ultra-precision plane honing. In Key Engineering Materials (pp. 359-364). (Key Engineering Materials; Vol. 291-292). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-974-1.359