Improvement of focused ion-beam optics in single-ion implantation for higher aiming precision of one-by-one doping of impurity atoms into nano-scale semiconductor devices

Takahiro Shinada, Hikaru Koyama, Chie Hinoshita, Ken Imamura, Iwao Ohdomari

Research output: Contribution to journalArticle

43 Citations (Scopus)

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Engineering & Materials Science

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