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Improvement of barrier anodic oxide Al2O3 passivation of aluminum alloy for LSI/FPD plasma process equipment
Minoru Tahara, Yasuhiro Kawase, Masafumi Kitano, Fumikazu Mizutani, Yasuyuki Shirai, Tadahiro Ohmi
Research output: Contribution to journal › Conference article › peer-review
1
Citation
(Scopus)