Improvement of barrier anodic oxide Al2O3 passivation of aluminum alloy for LSI/FPD plasma process equipment

Minoru Tahara, Yasuhiro Kawase, Masafumi Kitano, Fumikazu Mizutani, Yasuyuki Shirai, Tadahiro Ohmi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

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Engineering & Materials Science