Improvement of an air-bearing displacement sensor with nanometric resolution

So Ito, Kang Won Lee, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to reduce the measurement force, a novel controlling technique of a contact force has been developed. During the measurement one edge of the stylus is maintained contact with the measured surface by its own weight. Another end of the stylus is connected with a counter weight by a string and the stylus is hanging on the string in order to reduce the contact force between the edge of the stylus and the measured surface. Measuring force is estimated to confirm the effectiveness of the counter weight. Surface measurement of a steel ball is carried out using the developed air-bearing displacement sensor.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Pages945-950
Number of pages6
ISBN (Print)9783037855096
DOIs
Publication statusPublished - 2012 Jan 1
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period12/11/812/11/10

Keywords

  • Air-bearing displacement sensor
  • Low loading measurement
  • On-machine measurement
  • Surface profile measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Ito, S., Lee, K. W., Shimizu, Y., & Gao, W. (2012). Improvement of an air-bearing displacement sensor with nanometric resolution. In Emerging Technology in Precision Engineering XIV (pp. 945-950). (Key Engineering Materials; Vol. 523-524). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.523-524.945