Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array

Jin Young, Yoshikazu Arai, Wei Gao

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper describes a Fast Tool Control (FTC) unit integrated with a piezoelectric force sensor, which is designed for in-process measurement of the cutting force during the fabrication of micro-lens array. The piezoelectric force sensor integrated with the FTC unit is designed to have a stroke of 48 m, a bandwidth of 7837 Hz and a stiffness of 34.67 N/ μm. The micro-lens array is fabricated with a length of 190 m and a depth of 5.2 μm on the oxygen-free copper surface and the Ni P plating surface. The measured cutting forces of the oxygen-free copper surface and the Ni P plating surface were 0.54 N and 0.92 N, respectively. The cutting tool wear could be detected through monitoring the cutting force by developed FTC unit integrated with a piezoelectric force sensor.

Original languageEnglish
Pages (from-to)227-241
Number of pages15
JournalInternational Journal of Surface Science and Engineering
Volume3
Issue number3
DOIs
Publication statusPublished - 2009

Keywords

  • Diamond turning machine
  • Fast tool control unit
  • In-process measurement
  • Micro-lens array
  • Piezoelectric force sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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