Abstract
This paper describes a Fast Tool Control (FTC) unit integrated with a piezoelectric force sensor, which is designed for in-process measurement of the cutting force during the fabrication of micro-lens array. The piezoelectric force sensor integrated with the FTC unit is designed to have a stroke of 48 m, a bandwidth of 7837 Hz and a stiffness of 34.67 N/ μm. The micro-lens array is fabricated with a length of 190 m and a depth of 5.2 μm on the oxygen-free copper surface and the Ni P plating surface. The measured cutting forces of the oxygen-free copper surface and the Ni P plating surface were 0.54 N and 0.92 N, respectively. The cutting tool wear could be detected through monitoring the cutting force by developed FTC unit integrated with a piezoelectric force sensor.
| Original language | English |
|---|---|
| Pages (from-to) | 227-241 |
| Number of pages | 15 |
| Journal | International Journal of Surface Science and Engineering |
| Volume | 3 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2009 |
Keywords
- Diamond turning machine
- Fast tool control unit
- In-process measurement
- Micro-lens array
- Piezoelectric force sensor
ASJC Scopus subject areas
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films