Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping

Katsumi Takahiro; Ryosuke Ookawa; Kiyoshi Kawatsura; Shinji Nagata; Fumitaka Nishiyama; Shunya Yamamoto; Kazumasa Narumi; Hiroshi Naramoto; Masaya Iwaki

doi:10.1016/S0925-9635(03)00108-0

Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping

Katsumi Takahiro, Ryosuke Ookawa, Kiyoshi Kawatsura, Shinji Nagata, Fumitaka Nishiyama, Shunya Yamamoto, Kazumasa Narumi, Hiroshi Naramoto, Masaya Iwaki

Materials Design Division

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We have demonstrated that hydrogen doping (∼30 at.%) improves the surface roughness of N-implanted glassy carbon (GC). Prior to nitrogen implantation, D⁺₂ molecular ions with energy of 10 keV were implanted in GC to a dose of 6 × 10¹⁷ D cm^-2. Part of the doped hydrogen atoms is released by 100-keV N⁺₂ implantation, but hydrogen incorporation occurs simultaneously. Consequently, the concentration of hydrogen in the N-implanted layer exceeds 20 at.% at any N implantation dose. For hydrogen-doped GC, surface roughening due to N implantation was not observed in all cases examined. This indicates that hydrogen incorporation suppresses the surface roughening. A possible mechanism for the surface roughening and its suppression by hydrogen doping is discussed in terms of chemical bonding and structure in the N-implanted layer.

Original language	English
Pages (from-to)	1362-1367
Number of pages	6
Journal	Diamond and Related Materials
Volume	12
Issue number	8
DOIs	https://doi.org/10.1016/S0925-9635(03)00108-0
Publication status	Published - 2003 Aug

Keywords

Glassy carbon
Ion implantation
Raman spectroscopy
Scanning electron microscopy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/S0925-9635(03)00108-0

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Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping. / Takahiro, Katsumi; Ookawa, Ryosuke; Kawatsura, Kiyoshi; Nagata, Shinji; Nishiyama, Fumitaka; Yamamoto, Shunya; Narumi, Kazumasa; Naramoto, Hiroshi; Iwaki, Masaya.

In: Diamond and Related Materials, Vol. 12, No. 8, 08.2003, p. 1362-1367.

Research output: Contribution to journal › Article › peer-review

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title = "Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping",

abstract = "We have demonstrated that hydrogen doping (∼30 at.%) improves the surface roughness of N-implanted glassy carbon (GC). Prior to nitrogen implantation, D+2 molecular ions with energy of 10 keV were implanted in GC to a dose of 6 × 1017 D cm-2. Part of the doped hydrogen atoms is released by 100-keV N+2 implantation, but hydrogen incorporation occurs simultaneously. Consequently, the concentration of hydrogen in the N-implanted layer exceeds 20 at.% at any N implantation dose. For hydrogen-doped GC, surface roughening due to N implantation was not observed in all cases examined. This indicates that hydrogen incorporation suppresses the surface roughening. A possible mechanism for the surface roughening and its suppression by hydrogen doping is discussed in terms of chemical bonding and structure in the N-implanted layer.",

keywords = "Glassy carbon, Ion implantation, Raman spectroscopy, Scanning electron microscopy",

author = "Katsumi Takahiro and Ryosuke Ookawa and Kiyoshi Kawatsura and Shinji Nagata and Fumitaka Nishiyama and Shunya Yamamoto and Kazumasa Narumi and Hiroshi Naramoto and Masaya Iwaki",

year = "2003",

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T1 - Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping

AU - Takahiro, Katsumi

AU - Ookawa, Ryosuke

AU - Kawatsura, Kiyoshi

AU - Nagata, Shinji

AU - Nishiyama, Fumitaka

AU - Yamamoto, Shunya

AU - Narumi, Kazumasa

AU - Naramoto, Hiroshi

AU - Iwaki, Masaya

PY - 2003/8

Y1 - 2003/8

N2 - We have demonstrated that hydrogen doping (∼30 at.%) improves the surface roughness of N-implanted glassy carbon (GC). Prior to nitrogen implantation, D+2 molecular ions with energy of 10 keV were implanted in GC to a dose of 6 × 1017 D cm-2. Part of the doped hydrogen atoms is released by 100-keV N+2 implantation, but hydrogen incorporation occurs simultaneously. Consequently, the concentration of hydrogen in the N-implanted layer exceeds 20 at.% at any N implantation dose. For hydrogen-doped GC, surface roughening due to N implantation was not observed in all cases examined. This indicates that hydrogen incorporation suppresses the surface roughening. A possible mechanism for the surface roughening and its suppression by hydrogen doping is discussed in terms of chemical bonding and structure in the N-implanted layer.

AB - We have demonstrated that hydrogen doping (∼30 at.%) improves the surface roughness of N-implanted glassy carbon (GC). Prior to nitrogen implantation, D+2 molecular ions with energy of 10 keV were implanted in GC to a dose of 6 × 1017 D cm-2. Part of the doped hydrogen atoms is released by 100-keV N+2 implantation, but hydrogen incorporation occurs simultaneously. Consequently, the concentration of hydrogen in the N-implanted layer exceeds 20 at.% at any N implantation dose. For hydrogen-doped GC, surface roughening due to N implantation was not observed in all cases examined. This indicates that hydrogen incorporation suppresses the surface roughening. A possible mechanism for the surface roughening and its suppression by hydrogen doping is discussed in terms of chemical bonding and structure in the N-implanted layer.

KW - Glassy carbon

KW - Ion implantation

KW - Raman spectroscopy

KW - Scanning electron microscopy

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DO - 10.1016/S0925-9635(03)00108-0

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EP - 1367

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

IS - 8

ER -

Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping

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