Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping

Katsumi Takahiro, Ryosuke Ookawa, Kiyoshi Kawatsura, Shinji Nagata, Fumitaka Nishiyama, Shunya Yamamoto, Kazumasa Narumi, Hiroshi Naramoto, Masaya Iwaki

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We have demonstrated that hydrogen doping (∼30 at.%) improves the surface roughness of N-implanted glassy carbon (GC). Prior to nitrogen implantation, D+2 molecular ions with energy of 10 keV were implanted in GC to a dose of 6 × 1017 D cm-2. Part of the doped hydrogen atoms is released by 100-keV N+2 implantation, but hydrogen incorporation occurs simultaneously. Consequently, the concentration of hydrogen in the N-implanted layer exceeds 20 at.% at any N implantation dose. For hydrogen-doped GC, surface roughening due to N implantation was not observed in all cases examined. This indicates that hydrogen incorporation suppresses the surface roughening. A possible mechanism for the surface roughening and its suppression by hydrogen doping is discussed in terms of chemical bonding and structure in the N-implanted layer.

Original languageEnglish
Pages (from-to)1362-1367
Number of pages6
JournalDiamond and Related Materials
Issue number8
Publication statusPublished - 2003 Aug


  • Glassy carbon
  • Ion implantation
  • Raman spectroscopy
  • Scanning electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering


Dive into the research topics of 'Improvement in surface roughness of nitrogen-implanted glassy carbon by hydrogen doping'. Together they form a unique fingerprint.

Cite this