Improvement In Radiation Stability Of Sin X-Ray Mask Membranes

Tomiyuki Arakawa, Hiroshi Okuyama, Yoshio Yamashita, Tuneaki Ohta, Rakesh Kumar, Shuichi Noda, Hiroshi Hoga

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy