Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planarization techniques

M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. I. Arai, A. Haga, Y. Shimada, S. Tanabe, K. Itoh

Research output: Contribution to journalConference articlepeer-review

36 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds