The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.
|Journal||Digests of the Intermag Conference|
|Publication status||Published - 2000 Jan 1|
|Event||2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can|
Duration: 2000 Apr 9 → 2000 Apr 13
ASJC Scopus subject areas
- Electrical and Electronic Engineering