Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques

Masahiro Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. L. Arai, A. Haga, Y. Shimada, S. Tanabe, K. Ito

Research output: Contribution to journalConference articlepeer-review

Abstract

The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.

Original languageEnglish
JournalDigests of the Intermag Conference
Publication statusPublished - 2000 Jan 1
Event2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can
Duration: 2000 Apr 92000 Apr 13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques'. Together they form a unique fingerprint.

Cite this