Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques

Masahiro Yamaguchi; M. Baba; K. Suezawa; T. Moizumi; K. L. Arai; A. Haga; Y. Shimada; S. Tanabe; K. Ito

Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques

Masahiro Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. L. Arai, A. Haga, Y. Shimada, S. Tanabe, K. Ito

ENG - Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.

Original language	English
Journal	Digests of the Intermag Conference
Publication status	Published - 2000 Jan 1
Event	2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can Duration: 2000 Apr 9 → 2000 Apr 13

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques",

abstract = "The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.",

author = "Masahiro Yamaguchi and M. Baba and K. Suezawa and T. Moizumi and Arai, {K. L.} and A. Haga and Y. Shimada and S. Tanabe and K. Ito",

year = "2000",

month = jan,

day = "1",

language = "English",

journal = "Digests of the Intermag Conference",

issn = "0074-6843",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG ; Conference date: 09-04-2000 Through 13-04-2000",

}

TY - JOUR

T1 - Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planalization techniques

AU - Yamaguchi, Masahiro

AU - Baba, M.

AU - Suezawa, K.

AU - Moizumi, T.

AU - Arai, K. L.

AU - Haga, A.

AU - Shimada, Y.

AU - Tanabe, S.

AU - Ito, K.

PY - 2000/1/1

Y1 - 2000/1/1

N2 - The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.

AB - The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.

UR - http://www.scopus.com/inward/record.url?scp=0033711321&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033711321&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0033711321

JO - Digests of the Intermag Conference

JF - Digests of the Intermag Conference

SN - 0074-6843

T2 - 2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG

Y2 - 9 April 2000 through 13 April 2000

ER -