Abstract
The application of magnetic thin-film inductors for monolithic microwave integrated circuits (MMICs) has been proposed to reduce loss generation of currently used air-core spirals in MMICs and to save their area on expensive GaAs or Si MMIC chips. However, only 8.6% enhancement has been obtained to date with the use of Fe-Al-O granular film. This article discusses major improvements of the inductance enhancement by means of micro slits and surface planarization.
Original language | English |
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Journal | Digests of the Intermag Conference |
Publication status | Published - 2000 Jan 1 |
Event | 2000 IEEE International Magnetics Conference-2000 IEEE INTERMAG - Toronto, Ont, Can Duration: 2000 Apr 9 → 2000 Apr 13 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering