Improved quality factor of hetero acoustic layer (HAL) SAW resonator combining LiTaO3 thin plate and quartz substrate

Michio Kadota, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

A Hetero Acoustic Layer (HAL) SAW device is a new type of SAW device with a solidly mounted monocrystalline piezoelectric thin plate, which can obtain very high impedance ratio (ZR) and small temperature coefficient of frequency (TCF) at the same time. In this study, HAL SAW resonators using a LiTaO3 (LT) thin plate and a quartz substrate were investigated numerically and experimentally. The resonator fabricated using 20°YX LT and 40°Y90°X quartz exhibited a bandwidth (BW) of 5.0%, a ZR of 82 dB and a Bode Q of 3,000, which have been significantly improved from our previous report. The performance is better by a factor of 1.2 times in BW, 31 dB in ZR and 6.4 times in Bode Q compared with a standard SAW resonator on 42°YX LT, which was fabricated in the same facility. Further improvement in performance is expected after optimizing wafer cut angles, electrode metal and fabrication process.

Original languageEnglish
Title of host publication2017 IEEE International Ultrasonics Symposium, IUS 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781538633830
DOIs
Publication statusPublished - 2017 Oct 31
Event2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
Duration: 2017 Sep 62017 Sep 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17/9/617/9/9

Keywords

  • Bode Q
  • Hetero Acoustic Layer (HAL)
  • Impedance ratio
  • LiTaO3
  • Quartz
  • SAW resonator
  • TCF

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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