Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO3 thin plate and quartz substrate

Michio Kadota; Shuji Tanaka

doi:10.1109/ULTSYM.2017.8092963

Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO₃ thin plate and quartz substrate

Michio Kadota, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

For mobile communication, acoustic wave filters are being continuously required better steepness of a passband and a smaller temperature coefficient of frequency (TCF). Recently, various Hetero Acoustic Layer (HAL) types of surface acoustic wave (SAW) devices were reported by different groups including us [1-5]. HAL SAW devices inherently have many variations of structure and a lot of potentials. In this study, we report the bandwidth (BW) and impedance ratio (Z ratio) of different designs of HAL SAW resonators using a LiTaO3 thin plate on a quartz substrates.

Original language	English
Title of host publication	2017 IEEE International Ultrasonics Symposium, IUS 2017
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538633830
DOIs	https://doi.org/10.1109/ULTSYM.2017.8092963
Publication status	Published - 2017 Oct 31
Event	2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States Duration: 2017 Sep 6 → 2017 Sep 9

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2017 IEEE International Ultrasonics Symposium, IUS 2017
Country/Territory	United States
City	Washington
Period	17/9/6 → 17/9/9

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2017.8092963

Cite this

Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO₃ thin plate and quartz substrate. / Kadota, Michio; Tanaka, Shuji.

2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8092963 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kadota, M & Tanaka, S 2017, Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO₃ thin plate and quartz substrate. in 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8092963, IEEE International Ultrasonics Symposium, IUS, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8092963

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