TY - GEN
T1 - Improved quality factor of Hetero Acoustic Layer (HAL) SAW resonator combining LiTaO3 thin plate and quartz substrate
AU - Kadota, Michio
AU - Tanaka, Shuji
PY - 2017/10/31
Y1 - 2017/10/31
N2 - For mobile communication, acoustic wave filters are being continuously required better steepness of a passband and a smaller temperature coefficient of frequency (TCF). Recently, various Hetero Acoustic Layer (HAL) types of surface acoustic wave (SAW) devices were reported by different groups including us [1-5]. HAL SAW devices inherently have many variations of structure and a lot of potentials. In this study, we report the bandwidth (BW) and impedance ratio (Z ratio) of different designs of HAL SAW resonators using a LiTaO3 thin plate on a quartz substrates.
AB - For mobile communication, acoustic wave filters are being continuously required better steepness of a passband and a smaller temperature coefficient of frequency (TCF). Recently, various Hetero Acoustic Layer (HAL) types of surface acoustic wave (SAW) devices were reported by different groups including us [1-5]. HAL SAW devices inherently have many variations of structure and a lot of potentials. In this study, we report the bandwidth (BW) and impedance ratio (Z ratio) of different designs of HAL SAW resonators using a LiTaO3 thin plate on a quartz substrates.
UR - http://www.scopus.com/inward/record.url?scp=85039417785&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85039417785&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2017.8092963
DO - 10.1109/ULTSYM.2017.8092963
M3 - Conference contribution
AN - SCOPUS:85039417785
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
T2 - 2017 IEEE International Ultrasonics Symposium, IUS 2017
Y2 - 6 September 2017 through 9 September 2017
ER -