Imprinted laminate wafer-level packaging for SAW ID-tags and SAW delay line sensors

Jan H. Kuypers, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We have developed a wafer-level packaging solution for surface acoustic wave devices using imprinted dry film resist (DFR). The packaging process involves the preparation of an imprinted dry film resist that is aligned and laminated to the device wafer and requires one additional lithography step to define the package outline. Two commercial dry film solutions, SU-8 and TMMF, have been evaluated. Compared with traditional ceramic packages, no detectable RF parasitics are introduced by this packaging process. At the same time, the miniature package dimensions allow for wafer-level probing. The packaging process has the great advantage that the cavity formation does not require any sacrificial layer and no liquids, and therefore prevents contamination or stiction of the packaged device. This non-hermetic packaging process is ideal for passive antenna modules using polymer technology for low-cost SAW identification (ID)-tags or lidding in low-temperature cofired ceramic (LTCC) antenna substrates for high-performance wireless sensors. This technique is also applicable to SAW filters and duplexers for module integration in cellular phones using flip-chip mounting and hermetic overcoating.

Original languageEnglish
Article number5716458
Pages (from-to)406-413
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume58
Issue number2
DOIs
Publication statusPublished - 2011 Feb 1

Keywords

  • Cavity resonators
  • Films
  • Glass
  • Packaging
  • Positron emission tomography
  • Resists

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Imprinted laminate wafer-level packaging for SAW ID-tags and SAW delay line sensors'. Together they form a unique fingerprint.

  • Cite this