Impedance of Cubic Li7La3Zr2O12 Film Deposited on Strontium Ruthenate Substrate by Chemical Vapor Deposition

Hirokazu Katsui, Takashi Goto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


A garnet-type lithium lanthanum zirconium oxide (Li7La3Zr2O12) film was deposited on a strontium ruthenate (SrRuO3) substrate by chemical vapor deposition using metal organic precursors and its ionic conductivity was investigated by impedance spectroscopy in the temperature range of 298-368 K. A single-phase cubic Li7La3Zr2O12 film with a dense granular morphology was formed on the SrRuO3 electrode substrate at a deposition temperature of 1223 K and total pressure of 400 Pa. The complex plane plots of the Li7La3Zr2O12 film comprised part of a semicircle, associated with the transport of Li ions through the film at high frequencies, and a significant spike, attributed to the Warburg impedance at low frequencies. The ionic conductivity was 1.4 × 10-5 S·cm-1 at room temperature and increased with an increase in temperature, with an activation energy of 0.36 eV.

Original languageEnglish
Pages (from-to)11445-11448
Number of pages4
JournalMaterials Today: Proceedings
Issue number11
Publication statusPublished - 2017


  • CVD
  • Conductivity
  • Electrical conductive substrate
  • Impedance spectroscopy
  • LiLaZrO

ASJC Scopus subject areas

  • Materials Science(all)

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