IMPEDANCE MEASUREMENTS TO STUDY SEMICONDUCTOR SURFACE AND THIN INSULATING FILMS ON ITS SURFACE.

Jun ichi Nishizawa, Mitsumasa Koyanagi, Mitsuteru Kimura

Research output: Contribution to conferencePaperpeer-review

Abstract

To obtain information on the physical states of a semiconductor surface, the behavior of the carriers distributed near the surface was investigated by measuring the impedance of MOS diodes. In addition, an equivalent circuit for the semiconductor surface was constructed on the basis of the impedance and the admittance diagrams and some theories. A technique is proposed for obtaining of two metal electrodes, one set near the surface and the other on the bulk of the semiconductor.

Original languageEnglish
Pages773-780
Number of pages8
Publication statusPublished - 1974 Jan 1
EventInt Vac Congr, 6th, Proc - Kyoto, Jpn
Duration: 1974 Mar 251974 Mar 29

Other

OtherInt Vac Congr, 6th, Proc
CityKyoto, Jpn
Period74/3/2574/3/29

ASJC Scopus subject areas

  • Engineering(all)

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