Impact of mechanical stress control on VLSI fabrication process

Shuji Ikeda, Yasuhide Hagiwara, Hideo Miura, Hiroyuki Ohta

Research output: Contribution to journalConference articlepeer-review

26 Citations (Scopus)

Fingerprint Dive into the research topics of 'Impact of mechanical stress control on VLSI fabrication process'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science