Impact of high-temperature annealing of AlN layer on sapphire and its thermodynamic principle

Hiroyuki Fukuyama, Hideto Miyake, Gou Nishio, Shuhei Suzuki, Kazumasa Hiramatsu

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Impact of high-temperature annealing of AlN layer on sapphire and its thermodynamic principle'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy