Impact of carbon co-implantation on boron distribution and activation in silicon studied by atom probe tomography and spreading resistance measurements

Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue, Fumiko Yano, Shuichi Kudo, Akio Nishida, Takeshi Toyama, Yasuyoshi Nagai

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14 Citations (Scopus)

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Engineering & Materials Science

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