Imaging with a rectangular phase grating applied to displacement metrology

Yoichi Ohmura, Toru Oka, Toshiro Nakashima, Kazuhiro Hane

Research output: Contribution to journalReview articlepeer-review

3 Citations (Scopus)

Abstract

We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a 50% duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.

Original languageEnglish
Pages (from-to)1713-1720
Number of pages8
JournalApplied optics
Volume45
Issue number8
DOIs
Publication statusPublished - 2006 Mar 10

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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