Imaging of optical and topographical distributions by simultaneous near field scanning optical/atomic force microscopy with a microfabricated photocantilever

Kenji Fukuzawa, Yuriko Tanaka, Shinya Akamine, Hiroki Kuwano, Hirofumi Yamada

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

Simultaneous near field scanning optical and atomic force microscopy with a microfabricated photocantilever reveal both optical and topographical distributions. The cantilever tip changes the evanescent field into scattering light, and this scattering light is detected with a photodiode fabricated in the tip of the cantilever. The cantilever deflection signal leads to atomic force images. The resolution for imaging the evanescent field variation was 20 nm (λ/30). The near field optical and atomic force images indicate that the same point of the cantilever tip generates both optical and atomic force signals. This method is a new approach to optical and topographical microscopy with nanometer resolution.

Original languageEnglish
Pages (from-to)7376-7381
Number of pages6
JournalJournal of Applied Physics
Volume78
Issue number12
DOIs
Publication statusPublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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