Imaging of micro-discharge in a micro-gap of electrostatic actuator

Takahito Ono, Dong Youn Sim, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

16 Citations (Scopus)

Abstract

Weak light emission caused an ionization process of gases in the micro gap of an electrostatic actuator under a high electric field can be imaged using a high sensitive CCD camera, even if the electric field strength is below the breakdown threshold. The observation of the ionization process give an information about a space charge distribution in gases. It is found that irregular instability and the inhomogeneous distribution of electric field develop micro-discharges. The micro-discharge evaporates an electrode material, results in increasing the pressure in the gap, finally grows up to the breakdown. This effect is seemed to be remarkable, especially in narrow gaps. Furthermore, the electric breakdown threshed depends on the electrode material. Silicon-to-silicon gap configuration shows a higher breakdown threshold as well as the prebreakdown threshold in comparison with silicon-to-metal gap. It suggests that γi effect plays an important role in this process.

Original languageEnglish
Pages651-656
Number of pages6
Publication statusPublished - 2000 Jan 1
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: 2000 Jan 232000 Jan 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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