Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe

Takahito Ono; Sang Jin Kim; Masayoshi Esashi

doi:10.1063/1.2742908

Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe

Takahito Ono, Sang Jin Kim, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

Abstract

This letter reports on an imaging technique of acoustic pressure radiation (APR) from vibrating micro-/nanostructures and their mechanical defects. Resonance oscillation of micro-/nanometer beams in use of viscous environments is important for various sensing applications. Viscous dumping is the main energy loss mechanism, which determines the quality factor of resonance in viscous fluid. The APR due to viscous dumping is imaged using a scanning thermal flow sensor. A platinum heater or micromachined silicon heater is heated up by flowing a current, and the acoustic particle velocity which originated from APR is detected. Imaging of APR is demonstrated and compared with the actual vibration image. Also, strong APR is observed from a crack on the support of a silicon beam.

Original language	English
Article number	211911
Journal	Applied Physics Letters
Volume	90
Issue number	21
DOIs	https://doi.org/10.1063/1.2742908
Publication status	Published - 2007

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2742908

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title = "Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe",

abstract = "This letter reports on an imaging technique of acoustic pressure radiation (APR) from vibrating micro-/nanostructures and their mechanical defects. Resonance oscillation of micro-/nanometer beams in use of viscous environments is important for various sensing applications. Viscous dumping is the main energy loss mechanism, which determines the quality factor of resonance in viscous fluid. The APR due to viscous dumping is imaged using a scanning thermal flow sensor. A platinum heater or micromachined silicon heater is heated up by flowing a current, and the acoustic particle velocity which originated from APR is detected. Imaging of APR is demonstrated and compared with the actual vibration image. Also, strong APR is observed from a crack on the support of a silicon beam.",

author = "Takahito Ono and Kim, {Sang Jin} and Masayoshi Esashi",

note = "Funding Information: Part of this work was performed in the MicroNanomachining Research and Education Center (MNC) of Tohoku University. This work was supported in part by a Grant-in Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology of Japan, and also supported in part by Core Research for Evolution Science and Technology Agency (CREST) of the Japan Science and Technology Agency (JST).",

year = "2007",

doi = "10.1063/1.2742908",

language = "English",

volume = "90",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

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AU - Ono, Takahito

AU - Kim, Sang Jin

AU - Esashi, Masayoshi

N1 - Funding Information: Part of this work was performed in the MicroNanomachining Research and Education Center (MNC) of Tohoku University. This work was supported in part by a Grant-in Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology of Japan, and also supported in part by Core Research for Evolution Science and Technology Agency (CREST) of the Japan Science and Technology Agency (JST).

PY - 2007

Y1 - 2007

N2 - This letter reports on an imaging technique of acoustic pressure radiation (APR) from vibrating micro-/nanostructures and their mechanical defects. Resonance oscillation of micro-/nanometer beams in use of viscous environments is important for various sensing applications. Viscous dumping is the main energy loss mechanism, which determines the quality factor of resonance in viscous fluid. The APR due to viscous dumping is imaged using a scanning thermal flow sensor. A platinum heater or micromachined silicon heater is heated up by flowing a current, and the acoustic particle velocity which originated from APR is detected. Imaging of APR is demonstrated and compared with the actual vibration image. Also, strong APR is observed from a crack on the support of a silicon beam.

AB - This letter reports on an imaging technique of acoustic pressure radiation (APR) from vibrating micro-/nanostructures and their mechanical defects. Resonance oscillation of micro-/nanometer beams in use of viscous environments is important for various sensing applications. Viscous dumping is the main energy loss mechanism, which determines the quality factor of resonance in viscous fluid. The APR due to viscous dumping is imaged using a scanning thermal flow sensor. A platinum heater or micromachined silicon heater is heated up by flowing a current, and the acoustic particle velocity which originated from APR is detected. Imaging of APR is demonstrated and compared with the actual vibration image. Also, strong APR is observed from a crack on the support of a silicon beam.

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Imaging of acoustic pressure radiation from vibrating microstructure in atmosphere using thermal microprobe

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