Imaging of acoustic emission from vibrating micro/nano structures

Takahito Ono, Sang Jin Kim, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a novel imaging technique of acoustic emission from vibrating micro- and nano-structures is proposed and demonstrated for characterizing their mechanical energy losses via ambient air. A thermal probe is employed for the measurement of particle velocity involved in the acoustic emission. Imaging is obtained with scanning the vibrating sample under the thermal probe, which exhibits the geometry dependence on acoustic emission profile. Also it is found that strong acoustic emission is emitted from a mechanical detect formed on the vibrating beam.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages242-245
Number of pages4
Publication statusPublished - 2006 Oct 24
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
Country/TerritoryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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