Imaging detection of ethanol vapor by scanning photo-induced impedance microscopy with suspended-gate structure

Mengyun Wang, Hoang Anh Truong, Carl Frederik Werner, Ko Ichiro Miyamoto, Tatsuo Yoshinobu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Scanning photo-induced impedance microscopy (SPIM) is an imaging technique for the investigation of impedances on the insulating surface of a semiconductor substrate, based on the monitoring of a photocurrent signal generated by a modulated light. In this research, a gas-sensitive SPIM sensor with a suspended-gate structure is presented, to detect local impedance changes of a sensing film on the sensor surface in response to ethanol vapor. Thanks to the light-Addressability of SPIM, a spatially resolved photocurrent signal is captured and converted into 2-dimensional images for the observation of local impedance changes arising from the interaction between ethanol vapor and a SnO2 film at room temperature. Especially, the proposed gas-imaging sensor has a field-effect structure with an air gap to form a suspended-gate structure, resulting in an electrode contactless platform, which makes it possible to integrate multiple sensing elements on one single chip surface to detect gas mixtures without the need of complex wiring in the future.

Original languageEnglish
Title of host publicationISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538683279
DOIs
Publication statusPublished - 2019 May
Event18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019 - Fukuoka, Japan
Duration: 2019 May 262019 May 29

Publication series

NameISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings

Conference

Conference18th International Symposium on Olfaction and Electronic Nose, ISOEN 2019
Country/TerritoryJapan
CityFukuoka
Period19/5/2619/5/29

Keywords

  • SPIM
  • SnO
  • ethanol vapor
  • gas sensor
  • impedance imaging

ASJC Scopus subject areas

  • Signal Processing
  • Instrumentation

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