Imaging and evaluation of nano-scale crack by using ultrasonic atomic force microscopy

T. Tsuji, H. Irihama, T. Mihara, Kazushi Yamanaka

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


Evaluation method of nano-scale internal cracks by ultrasonic atomic force microscopy (UAFM) is proposed based on two approaches. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by obtaining the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. As a result, it was proved that the proposed method is useful for evaluating the opening-and-closing behavior of the gap. Although the present study is focused on a nano-scale gap, this method is applicable to larger scale cracks using a larger tip and more stiff support than those used in AFM.

Original languageEnglish
Pages (from-to)1067-1072
Number of pages6
JournalKey Engineering Materials
Issue numberII
Publication statusPublished - 2004 Jan 1
EventAdvances in Fracture and Failure Prevention: Proceedings of the Fifth International Conference on Fracture and Strength of Solids (FEOFS2003): Second International Conference on Physics and Chemistry of Fracture and Failure Prevention (2nd ICPCF) - Sendai, Japan
Duration: 2003 Oct 202003 Oct 22


  • Linear vibration
  • Nanoscale crack
  • Nondestructive evaluation
  • Nonlinear vibration
  • Opening-and-closing behavior
  • Ultrasonic atomic force microscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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