Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface

Makoto Tano; Wei Gao; Takeshi Araki; Satoshi Kiyono

Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface

Makoto Tano, Wei Gao, Takeshi Araki, Satoshi Kiyono

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Error components in a sinusoidal grid surface fabricated by diamond turning, which are identified by an evaluation method based on 2D DFT of interference microscope images of the surface, are compensated for through feedback.

Original language	English
Title of host publication	Optical Fabrication and Testing, OFT 2004
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	1557527792
Publication status	Published - 2004
Event	Optical Fabrication and Testing, OFT 2004 - Rochester, United States Duration: 2004 Oct 11 → 2004 Oct 13

Publication series

Name	Optics InfoBase Conference Papers

Conference

Conference	Optical Fabrication and Testing, OFT 2004
Country/Territory	United States
City	Rochester
Period	04/10/11 → 04/10/13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Cite this

Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface. / Tano, Makoto; Gao, Wei; Araki, Takeshi et al.

Optical Fabrication and Testing, OFT 2004. Optica Publishing Group (formerly OSA), 2004. OTuC4 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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title = "Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface",

abstract = "Error components in a sinusoidal grid surface fabricated by diamond turning, which are identified by an evaluation method based on 2D DFT of interference microscope images of the surface, are compensated for through feedback.",

author = "Makoto Tano and Wei Gao and Takeshi Araki and Satoshi Kiyono",

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year = "2004",

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T1 - Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface

AU - Tano, Makoto

AU - Gao, Wei

AU - Araki, Takeshi

AU - Kiyono, Satoshi

PY - 2004

Y1 - 2004

N2 - Error components in a sinusoidal grid surface fabricated by diamond turning, which are identified by an evaluation method based on 2D DFT of interference microscope images of the surface, are compensated for through feedback.

AB - Error components in a sinusoidal grid surface fabricated by diamond turning, which are identified by an evaluation method based on 2D DFT of interference microscope images of the surface, are compensated for through feedback.

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M3 - Conference contribution

AN - SCOPUS:85135935056

T3 - Optics InfoBase Conference Papers

BT - Optical Fabrication and Testing, OFT 2004

PB - Optica Publishing Group (formerly OSA)

T2 - Optical Fabrication and Testing, OFT 2004

Y2 - 11 October 2004 through 13 October 2004

ER -

Identification and compensation of fabrication errors in diamond turning of a large area sinusoidal grid surface

Abstract

Publication series

Conference

ASJC Scopus subject areas

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