Ideal static induction transistor implemented with molecular layer epitaxy

Piotr Płotka, Toru Kurabayashi, Yutaka Oyama, Jun ichi Nishizawa

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Abstract

Molecular layer epitaxy (MLE) was applied for fabrication of static induction transistors (SIT) with electrical source-drain distances from 170 Å (metallurgical 90 Å) to 1000 Å. Channels-gates were regrown selectively under an overchanging SiNx mask in a self-alignment way on sidewalls of ex-situ etched grooves. Characteristics of the SITs reveal dependence of properties of the crystal regrown on a sidewall on the sidewall orientation. 170 Å (90 Å) transistors with gate interfaces parallel to the 〈011̄〉 direction are normally-off while the transistors with gates parallel to 〈011〉 are normally- on.

Original languageEnglish
Pages (from-to)91-96
Number of pages6
JournalApplied Surface Science
Volume82-83
Issue numberC
DOIs
Publication statusPublished - 1994 Dec 2
Externally publishedYes

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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