Abstract
Ca-Ti-O films were prepared by MOCVD using Ca(dpm)2 and Ti(OiPr)2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O films changed depending on the molar ratio of Ca to Ti precursors (RCa/Ti), total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense structure and smooth surface. CaTiO3 films prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. Hydroxyapatite (HAp) formed in 3 days on the CaTiO3 film prepared at Tsub = 1073 K.
Original language | English |
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Pages (from-to) | 301-304 |
Number of pages | 4 |
Journal | Key Engineering Materials |
Volume | 352 |
DOIs | |
Publication status | Published - 2007 Jan 1 |
Keywords
- Calcium titanate
- Hanks' solution
- Hydroxyapatite
- Metal-organic chemical vapor deposition
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering