Hydrothermal Corrosion of CVD Coated TiC, TiN, TiCN, TiCNO Films

Yoshinori Kanno, Masatomo Yashima, Masato Kakihana, Masahiro Yoshimura

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Wet corrosion by high temperature-high pressure water has been studied on CVD coated Ti base ceramic films (thickness ca.10μm, TiC, TiN, TiC0.3N0.7, TiC0.3N0.7O0.1) at 300∼680°C under 100 MPa for 2 h. The order of corrosion resistance was obtained as TiN>TiCN>TiCNO>TiC from the X-ray diffraction analysis of scale layers and the reaction ratio calculated from the weight gain. The order was discussed on the volume ratio φ defined by Pilling-Bedworth, the internal stress within the coated films, and the dissolution behavior of gaseous species at the interface of ceramic film-oxide scale. The oxide scale crystallized as anatase in TiC and transformed into rutile at higher temperatures. On the other hand, rutile deposited directly in other samples having a higher corrosion resistance.

Original languageEnglish
Pages (from-to)780-783
Number of pages4
JournalJournal of the Society of Materials Science, Japan
Issue number478
Publication statusPublished - 1993 Jan 1
Externally publishedYes


  • CVD film
  • Corrosion resistance
  • Internal stress
  • Surface layer
  • TiC
  • TiCN
  • TiCNO
  • TiN
  • Wet corrosion by high temperature-high pressure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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